Fundamental Principles of Optical Lithography: The Science of Microfabrication - Mack, Chris (Lithoguru.com) - Books - John Wiley & Sons Inc - 9780470018934 - January 15, 2008
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Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication

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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

534 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 15, 2008
ISBN13 9780470018934
Publishers John Wiley & Sons Inc
Pages 544
Dimensions 171 × 249 × 37 mm   ·   1.14 kg
Language English  

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