Lithography Process Control - Tutorial Texts - Harry J. Levinson - Books - SPIE Press - 9780819430526 - February 1, 1999
In case cover and title do not match, the title is correct

Harry J. Levinson
Lithography Process Control - Tutorial Texts

Get an email once the item is available
Do you have a profile? Log in

Our customers say:

14-day return policy in accordance with European consumer protection law
Top ranking on Trustpilot
Add to your iMusic wish list

This text is intended to be a self-contained tutorial on lithography process control. It works as an introduction to those entering the field, and as a reference for the experienced lithography engineer. Topics covered include linewidth control, overlay, and yield.

194 pages, Illustrations, 1 port.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 1, 1999
ISBN13 9780819430526
Publishers SPIE Press
Pages 194
Dimensions 150 × 220 × 10 mm   ·   444 g

Mere med samme udgiver

See all of Harry J. Levinson ( e.g. Paperback Book , Hardcover Book and Book )