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Microsystem Design Stephen D. Senturia 1st Ed. 2000. Corr. 2nd Printing 2004 edition
Microsystem Design
Stephen D. Senturia
Covers the fundamentals of several disciplines required by engineers working in the field of microelectromechanical systems (MEMS). This book includes several case studies and is acccomapanied by a website that includes homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples.
689 pages, 145 black & white illustrations, biography
| Media | Books Book |
| Released | November 30, 2000 |
| ISBN13 | 9780792372462 |
| Publishers | Kluwer Academic Publishers |
| Pages | 689 |
| Dimensions | 169 × 243 × 44 mm · 1.18 kg |
| Language | English |
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