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Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE) Herr
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Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE)
Herr
1296 pages
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 30, 2003 |
| ISBN13 | 9780819448439 |
| Publishers | SPIE Press |
| Pages | 1296 |
| Dimensions | 150 × 220 × 10 mm · 2.14 kg (Weight (estimated)) |