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Particle Control for Semiconductor Manufacturing R.P. Donovan 1st edition
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Particle Control for Semiconductor Manufacturing
R.P. Donovan
There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In
480 pages
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | January 26, 1990 |
| ISBN13 | 9780824782429 |
| Publishers | Taylor & Francis Inc |
| Pages | 480 |
| Dimensions | 150 × 220 × 20 mm · 1.09 kg |
| Language | English |
