A Guide to Hands-on MEMS Design and Prototyping - Kubby, Joel A. (University of California, Santa Cruz) - Books - Cambridge University Press - 9781107645790 - August 25, 2011
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Kubby, Joel A. (University of California, Santa Cruz)
A Guide to Hands-on MEMS Design and Prototyping

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Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.

178 pages, 132 b/w illus. 1 table 33 exercises

Media Books     Paperback Book   (Book with soft cover and glued back)
Released August 25, 2011
ISBN13 9781107645790
Publishers Cambridge University Press
Pages 178
Dimensions 151 × 229 × 15 mm   ·   376 g   (Weight (estimated))
Language English  

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