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Optical Inspection of Microsystems, Second Edition Wolfgang Osten 2nd edition
Optical Inspection of Microsystems, Second Edition
Wolfgang Osten
This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.
600 pages, 32 Illustrations, color; 525 Illustrations, black and white
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | June 25, 2019 |
| ISBN13 | 9781498779470 |
| Publishers | Taylor & Francis Inc |
| Pages | 570 |
| Dimensions | 262 × 188 × 30 mm · 1.38 kg |
| Language | English |
| Editor | Osten, Wolfgang (Universitat Stuttgart, Germany) |