Principles Of Lithography - Harry J. Levinson - Books - SPIE Press - 9781510627604 - July 30, 2019
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Harry J. Levinson
Principles Of Lithography Fourth edition

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This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.

630 pages

Media Books     Book
Released July 30, 2019
ISBN13 9781510627604
Publishers SPIE Press
Pages 630
Dimensions 262 × 185 × 31 mm   ·   1.42 kg

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