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Semiconductor Industry: Wafer Fab Exhaust Management Sherer, J. Michael (Sherer Consulting Services, Gilbert, Arizona, USA) 1st edition
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Semiconductor Industry: Wafer Fab Exhaust Management
Sherer, J. Michael (Sherer Consulting Services, Gilbert, Arizona, USA)
Given the myriad exhaust compounds and the corresponding problems they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, this book offers guidance on selecting an appropriate system for a given application.
216 pages
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | June 23, 2005 |
| ISBN13 | 9781574447200 |
| Publishers | Taylor & Francis Inc |
| Pages | 212 |
| Dimensions | 243 × 164 × 17 mm · 454 g |
| Language | English |
