Molecular Theory of Lithography - Press Monographs - Uzodinma Okoroanyanwu - Books - SPIE Press - 9781628415513 - December 30, 2015
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Uzodinma Okoroanyanwu
Molecular Theory of Lithography - Press Monographs

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Offers a unified exposition of the molecular theory that underlies lithographic imaging. The text explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithographic process, as well as for advanced lithographic imaging mechanisms.

488 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 30, 2015
ISBN13 9781628415513
Publishers SPIE Press
Pages 488
Dimensions 150 × 220 × 20 mm   ·   1.21 kg

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