Advanced MEMS / NEMS Fabrication and Sensors - - Books - Springer Nature Switzerland AG - 9783030797485 - October 13, 2021
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Advanced MEMS / NEMS Fabrication and Sensors 2022 edition

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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.

312 pages, 75 Tables, color; 157 Illustrations, color; 10 Illustrations, black and white; VI, 312 p.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released October 13, 2021
ISBN13 9783030797485
Publishers Springer Nature Switzerland AG
Pages 312
Dimensions 369 × 161 × 23 mm   ·   656 g
Language German  
Editor Yang, Zhuoqing

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