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Atomic Layer Processing: Semiconductor Dry Etching Technology Thorsten Lill
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Atomic Layer Processing: Semiconductor Dry Etching Technology
Thorsten Lill
325 pages
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | April 21, 2021 |
| ISBN13 | 9783527346684 |
| Publishers | Wiley-VCH Verlag GmbH |
| Pages | 304 |
| Dimensions | 245 × 171 × 18 mm · 584 g |
| Language | English |
See all of Thorsten Lill ( e.g. Book and Paperback Book )